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Politics : Formerly About Applied Materials -- Ignore unavailable to you. Want to Upgrade?


To: StanX Long who wrote (62068)3/14/2002 1:47:16 AM
From: StanX Long  Read Replies (1) | Respond to of 70976
 
Corning increases production for 193-nm lithography-lens materials
Semiconductor Business News
(03/13/02 15:42 p.m. EST)
siliconstrategies.com

SANTA CLARA, Calif. -- In a move to keep up with growing demand for its lithography-lens materials, Corning Inc. is aggressively ramping up production of these products in its new plant in Canton, N.Y.

The plant will quadruple its overall capacity for calcium-fluoride materials used in 193-nm lithography lenses, said Gitimoy Kar, director of the Fluoride Crystals Business Unit at Corning, in an interview at last week's SPIE Microlithography conference here.




The company's $30 million plant in Canton was originally announced last year (see Jan. 9 story ). The Corning-based company is also producing 193-nm lens materials at another plant in North Brookfield, Mass.

The plants will enable the company to keep up with greater-than-expected demand for its materials. Earlier last year, there was a chronic and severe shortage of calcium-fluoride material, which delayed the shipments of new exposure tools based on 193-nanometer argon-fluoride (ArF) laser technology (see March 2 story ).