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To: Yousef who wrote (163776)4/10/2002 5:05:31 PM
From: fingolfen  Respond to of 186894
 
Yes ... Low K is causing many companies to slip their .13um schedules. IBM was the "prime mover" behind SiLK ... But even they couldn't overcome the yield and reliability problems. Foundries are using Black Diamond (AMAT) and Coral (Novellus). Even these two candidates are not there yet. FSG is a much surer approach, however it has higher k value (~3.8).

Kinda what I thought... it looks like the spin-on glasses are in trouble from an integration standpoint but have a more attractive k-value whereas the CDO approaches appear to be better from an integration standpoint but have an inferior k-value.

So I wonder if the reliability failures with SiLK are intrinsic or have to do with packaging/assembly...