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Politics : Formerly About Applied Materials -- Ignore unavailable to you. Want to Upgrade?


To: StanX Long who wrote (62985)4/19/2002 1:04:31 AM
From: StanX Long  Read Replies (1) | Respond to of 70976
 
Applied executive warns of misleading low-k measurements in interconnects

By Sara Sowah of EETimes, UK
Semiconductor Business News
(04/18/02 13:52 p.m. EST)

siliconstrategies.com

MUNICH -- Let the buyer beware. Some materials being touted as low-k dielectrics films may not be low-k at all, warned Walter Schoenleber, senior director for technology at Applied Materials Europe.

Speaking at this week's Semicon Europa here, Schoenleber said the wafer fab equipment giant has noticed that a number of supposed low-k materials for IC interconnect structures are delivering disappointing results in tests, partly because of the combinations in which they sometimes need to be used.

Low-k materials -- typically described as films with a dielectric constant (k) of 3 and lower -- are seen as one way of insulating the metal interconnects in ICs and preventing cross-talk interference as process geometries shrink. Chips also can run at higher speeds and consume less power because of reduced capacitance in the interconnects.

But Applied's Schoenleber says k values are often higher than expected. The values are impacted by the formulation of low-k materials, coating layers that prevents the low-k material being contaminated by copper metal lines and the interconnects themselves, said the Applied Materials executive.