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To: Ian@SI who wrote (299)	4/24/2002 12:59:50 PM
From: Return to Sender	Read Replies (1) \| Respond to of 13403

The only DUV laser competitor I have noted is COHR. Are there any significant others IAN? RtS

To: Ian@SI who wrote (299)	4/24/2002 3:07:47 PM
From: Cary Salsberg	Read Replies (1) \| Respond to of 13403

IF "DUV laser aren't a commodity" and "specific laser used probably has a major affect on process repeatability", then chipmakers will probably use the laser system that the stepper/scanner vendor initially designed in. As the laser becomes more of a commodity (the tool ages and is, possibly, no longer leading edge and the customer has more experience with it) price and support will have a greater impact and the customer may choose to use a laser replacement that was not the original make. I think the ETEC situation might be instructive. When AMAT paid a premium for it, it had the market share and reputation that CYMI currently enjoys. Recently, I have read that the ETEC division "tripped" and it has been leapfrogged by competitors in newer geometries.