To: maceng2 who wrote (10358 ) 5/28/2002 6:47:48 PM From: maceng2 Read Replies (1) | Respond to of 10921 Cymer, LTB to Develop Next-Gen DUV Spectrometer Online staff -- Electronic News, 5/21/2002 Cymer Inc. and LTB Lasertechnik Berlin GmbH today unveiled plans to jointly develop an advanced spectrometer for measuring the spectral performance of deep-ultraviolet (DUV) light sources. Spectral performance is relevant to photolithography steppers, which require light sources with extremely high spectral purity, measured in femtometers. Cymer said it requires a more advanced spectrometer capable of measuring the performance of its next-generation products. To this end, LTB will design, manufacture and distribute a next-generation version of its emission line analyzing spectrometer (ELIAS). Berlin-based LTB will also provide Cymer with field service. Cymer will supply the necessary IP and also standardize the interpretation of measurement data to enhance the spectrometer’s performance. Cymer also gains exclusive marketing and sales rights in the semiconductor lithography market. "Partnering with Cymer will enable us to build on the proven capabilities of our ELIAS system to produce a spectrometer that surpasses currently available spectral-measurement technologies by anticipating the metrology needs of advanced DUV light sources such as those Cymer is currently developing," said Matthias Scholz, managing director of LTB, in a statement. "In addition, utilizing Cymer’s extensive supply chain will help broaden the market opportunity for our products." Early next year, San Diego-based Cymer plans to begin shipping light sources based on its new master oscillator power amplifier (MOPA). The deal with LTB provides customers with spectral metrology tools of an accompanying standard, the company said.e-insite.net