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Politics : Formerly About Applied Materials -- Ignore unavailable to you. Want to Upgrade?

To: StanX Long who wrote (63603)	5/10/2002 12:18:19 AM
From: StanX Long	Read Replies (1) \| Respond to of 70976

Novellus Opens Oregon Copper Plant Online staff -- Electronic News, 5/9/2002 e-insite.net Novellus Systems Inc. today announced the opening a manufacturing plant in Tualatin, Ore., that will produce the company’s copper metallization and damascene dielectric deposition tools. San Jose-based Novellus said the 382,000-square-foot facility will serve as the company’s "copper campus." The copper campus will house Novellus’ Electrofill products business and the PECVD (plasma-enhanced chemical vapor deposition) products business. It will also produce the tools that deliver the core technologies required to fabricate copper circuitry or interconnects, the company said. The facility doubles Novellus’ manufacturing capacity for its PECVD products, VECTOR and SEQUEL Express, and provides expanded research and development space for its SABRE Electrofill product. The 58-acre Tualatin campus was designed to incorporate Class 1000 cleanroom space for system assembly, Class 100 cleanroom space for system testing of Novellus’ deposition equipment, and a Class 10 applications laboratory. The manufacturing and engineering buildings include full sub-fab basements, and all utilities to tools in the cleanrooms are fed through the waffle slab floor from below. These design features result in open cleanroom configurations that make equipment installation easier and less expensive, Novellus said.