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To: semiconeng who wrote (80908)	5/29/2002 1:43:28 AM
From: Elmer	Read Replies (2) \| Respond to of 275872

Semi - Who do you suppose took an equity position in Nikon today??? cnet.com EP

To: semiconeng who wrote (80908)	5/29/2002 1:52:12 AM
From: Yousef	Respond to of 275872

Semiconeng, Re: "Sorry to butt in on youse guyz fun here ... The "point" that Yousef is so..... (cough) diplomatically making, is that 193nm steppers will almost certainly be required for 90nm ..." CORRECT ... Also you bring up a very good point about availability. My understanding is that some Si foundries only have a low NA (numerical aperature) 193nm scanner for 90nm development. This just won't "cut it". Make It So, Yousef

To: semiconeng who wrote (80908)	5/29/2002 6:43:58 AM
From: TGPTNDR	Read Replies (1) \| Respond to of 275872

Semiconeng, Re: <Who do you think is first in line for 193nm Steppers.> I take it Intel did not wind up going with the Nikon as was rumored here(From February this year)? siliconstrategies.com ===================== Some info on the SVG tool set here(From December last year): siliconstrategies.com Intel is scrambling for 193-nm tools--and for good reason. The company is using 248-nm tools from ASML's Silicon Valley Group (SVG) unit and Nikon to successfully process its 0.13-micron chips, but those scanners could soon run out of gas and are not expected to extend down to its next-generation, 90-nm (0.09-micron) process node. The Santa Clara-based company is also in a race with microprocessor rival Advanced Micro Devices Inc. to develop chips at the 90-nm node and beyond. Intel hopes to develop its first 0.09-micron chips by early-2003 or sooner, the company said. Unlike AMD--which for years has used ASML's tools--Intel has been forced to shift gears in terms of its lithography strategy. Intel was originally supposed to use 193-nm scanners from SVG to process its 0.13-micron chips, according to sources. tgptndr

To: semiconeng who wrote (80908)	5/29/2002 7:44:01 AM
From: combjelly	Read Replies (1) \| Respond to of 275872

"is that 193nm steppers will almost certainly be required for 90nm in order to avoid Phase Shift Masking, and will Certainly be required for 65nm." Uh huh. But AMD has been a long term customer of ASML's leading edge equipment for a long while. They also placed an order last year sometime for 193nm equipment. There is no real reason to suspect that ASML will only ship to Intel exclusively...

To: semiconeng who wrote (80908)	5/29/2002 8:42:23 AM
From: Dan3	Read Replies (2) \| Respond to of 275872

Re: intel in the mid - 90's pumped millions of dollars into a subsidiary of "Silicon Valley Group" inc. This mini-company was the first Manufacturer to develop a "Step and Scan Stepper, "MIcraScan". Guess who got the best deals on those Steppers? That's beyond hilarious.... You keep hinting that you have hands on knowledge of Intel's manufacturing process - are you telling use that Intel's fate is tied to SVG 193nm steppers?

To: semiconeng who wrote (80908)	5/29/2002 1:11:40 PM
From: THE WATSONYOUTH	Read Replies (2) \| Respond to of 275872

This mini-company was the first Manufacturer to develop a "Step and Scan Stepper, "MIcraScan". Guess who got the best deals on those Steppers? If Intel was in so in bed with the manufacturers and got the best deal on the latest MicraScans, then why did they have to use that half ass notched process (since abandoned) to achieve their .18um gate lengths. MicraScan 3, combined with carefully controlled RIE trim processes could easily achieve Intel's .18um minimum channel lengths (and somewhat beyond) with excellent process control. It seems that everyone except Intel knew this. I'm sure Intel will not admit it, but that notch process (even based on a few random SEMs) was very crude. THE WATSONYOUTH