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To: Elmer who wrote (167876)7/10/2002 1:55:27 AM
From: semiconeng  Read Replies (2) | Respond to of 186894
 
Excellent point and I agree completely. Now getting back to diminished pressure for higher frequencies, Phase shifting is used to achieve minimum channel lengths which correlates to speed. What effect does phase shifting have on thru-put?

No doubt, Cuts throughput way down, but remember, Phase Shifting is used only on the Critical Layers, and Eliminating it would cost Millions in Stepper Costs for 0.13u at this point. I doubt intel has "Eliminate Phase Shifting" at the top of their Cost Reduction roadmap.

Also, I believe that intel announced they will use Phase Shifting only after the Stepper Manufacturers didn't come through with the 193nm Steppers. I don't believe the intent of using Phase Shifting was an effort to get higher Speed Parts, simply the Backup Plan. I think it's probably too late to go back for 0.13u at this point in intel's Ramp.

All good points you've made, and certainly Yield improvement for cost reduction is one way to go. I still don't believe it's the only way. I guess I'm just not sure that I would use the same cost reduction strategy you guys would use. But then again either way, it's all speculation...... ... Right?

Semi