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To: alfranco who wrote (6947)10/25/2002 7:47:07 PM
From: alfranco  Read Replies (1) | Respond to of 8393
 
Another new patent combines CVD & PVD

Again a quick scan but looks like wider deposition possible and the separate deposition machines (for example separate triple junction & top ITO layer machines)could be combined.
patent 6463874 granted 10/15/02 to ECD
164.195.100.11

Al