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To: robert b furman who wrote (721)	11/10/2002 8:49:08 PM
From: SemiBull	Read Replies (1) \| Respond to of 1138

Brooks-PRI debuts software monitoring/analysis tool By Semiconductor Business News Nov 8, 2002 (4:27 PM) URL: siliconstrategies.com CHELMSFORD, Mass.--Brooks-PRI Automation Inc. here announced iProcess-FDC, a software product that monitors fab tools and chip processes through the Internet and intranets. iProcess-FDC (Fault Detection and Classification) provides data visualization, virtual sensor modeling, and analysis, enabling chip makers to monitor and analyze process disruptions in chip production. “Fault detection and classification is critical to maintaining overall factory efficiency in the fab,” said Alan Deeter, vice president and general manager of the Equipment Engineering Solutions Business Unit of Brooks-PRI Automation, in a statement. “The ability to detect equipment excursions from known good performance prevents fabs from repeatedly manufacturing large amounts of expensive scrap,” he said. “iProcess-FDC, by combining familiar web display technology with powerful multi-variate analysis tools, enables process engineers to detect process problems before they have a major impact on costs and productivity,” he added. iProcess-FDC's easy-to-use interface enables engineers to deploy fault detection in IC production. It can be integrated into almost any factory infrastructure with or without automation.