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To: kinkblot who wrote (62)11/28/2003 4:12:36 PM
From: kinkblot  Respond to of 83
 
KLA-Tencor + SOITEC inspection tools JDP

soitec.com

However, unlike traditional silicon substrates, SOI and other engineered substrates are composed of multiple film layers of different thickness (depending on the target IC application), which create interference effects that cause current inspection technologies to provide false and inconsistent defect readings, as well as inadequate overall sensitivity.

This partnership is good strategy for the long haul.

What do customers want? To buy high quality substrates (extremely low defect densities) at low cost, i.e. to leave the quality control problem with their supplier.