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To: Cary Salsberg who wrote (860)8/25/1997 9:20:00 AM
From: Dave Grady  Respond to of 2946
 
I am only aware of Intel being interest uniquely in the lamp version of the MSIII. I think you are getting MSII and MSIII confused. Intel is interested in keeping its resist constant, while starting the MSIII transition. Thus, staying with the lamp. (The excimer laser is 248nm, and there is a cost advantage to the lamp that only Intel is pursuing as far as I know. The laser has advantages in resolution).



To: Cary Salsberg who wrote (860)3/27/1998 10:59:00 AM
From: Mason Barge  Read Replies (1) | Respond to of 2946
 
Cary - re your statement that <<INTC has used the Micrascan II with a 248nm HG lamp for 0.25um processing.>>

Do you know if they ever did this in production lines? Can you point me to a source? Thanks.


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