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To: etchmeister who wrote (148919)1/24/2005 1:56:04 PM
From: Elmer PhudRespond to of 275872
 
etchmeister

I think you got a point but Intel did also run 130nm on 300 mm substrates or am I mistaken?

You're right. Intel brought up 300mm on a 130nm process and ran it for several months.



To: etchmeister who wrote (148919)1/24/2005 2:22:44 PM
From: kpfRespond to of 275872
 
etchmeister

Intel did also run 130nm on 300 mm substrates

Yes, but in fabs with all tools being 90nm capable.

If I understood Paul O. right the preferable n-1 choice for their 130nm logic fabs is using it for chipsets. Although it could be they convert some to Flash as well - frankly i don't know.

300mm wafer economies apply for all diesizes.

K.


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