To: dr_elis who wrote (1106 ) 4/20/2006 3:04:05 PM From: niek Respond to of 43176 Intel on its own with ‘dry’ double patterning Thursday, 20 April 2006 FabTech As has been widely reported for some time ASML expects to ship between 20 and 25, 193 ArF immersion lithography tools during 2006. However, concern over these projections appeared straight after Intel Corp announced at the SPIE Microlithography Conference at the end of February 2006, that the company would not as expected adopt immersion at the 45nm node, rather it would be pushing out immersion to the 32nm node, while remaining ‘dry' and adopt double patterning techniques in the meantime. As one of ASML's largest customers, especially in respect to DUV lithography and the technology node migration leader, it was long assumed that Intel would migrate to immersion ahead of many other chip manufacturers. The numbers quoted by ASML were assumed by many to include an initial order from Intel. With that now not the case, the latest conference call with financial analysts was all the more remarkable in that the company reiterated that its 20 to 25 immersion tool shipments expected for 2006 were still on track. ASML executives hinted that the company may indeed exceed that figure, based on the quotation levels the company is receiving! So, with immersion lithography not catching a cold with other chip manufacturers who now seem unconcerned about the defect levels on the wafers due to the immersion process, is Intel going down the wrong path by staying ‘dry'? Intel's need to have good yields under a capacity constrained atmosphere is understandable but it is also going to take a throughput hit with double patterning. No, its not double the cycle time at the litho and track steps, but it is a hit! ASML's Eric Maurice stated in the conference call that he was not concerned about Intel's or other IC manufacturers using the double patterning technique instead of immersion and partially joked about the fact that this simply means companies will need twice the number of ArF ‘dry' tools, so he was happy both ways! How big a hit Intel will have to take on cycle times is yet to be fully understood and perhaps more importantly how much impact this would have on them should AMD find immersion both defect comparable with ‘dry' lithography but gain the throughput advantage at significantly lower cost than its only real rival! Going it alone or first to try something out as proven to be very costly in the semiconductor industry throughout its history. Currently Intel stands alone on using double patterning, while other leading-edge manufacturers are embracing immersion lithography. ASML stated that it now expects to ship 70 immersion tools in 2007, on top of the 25 plus units in 2006. Nikon expects to ship 15 immersion tools this year, one to Intel for evaluation. What is clear is that the other leading chip manufacturers are going to using immersion tools in production in 2007 and some may actually be used late in 2006! Intel is in trouble of catching a cold that could lead to pneumonia!