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To: pgerassi who wrote (228929)3/26/2007 9:47:44 AM
From: neolibRespond to of 275872
 
Copy exact assumes that each tool model is interchangeable. That wherever scanner model 1234 was used in the development line, another scanner model 1234 would work as well.

I think your view of Intel's "copy exact" is too extreme. I'm pretty sure Intel heavily uses SPC techniques on each tool as well. I don't think anything would work if you don't.



To: pgerassi who wrote (228929)3/26/2007 10:12:46 AM
From: combjellyRead Replies (1) | Respond to of 275872
 
"But that is the problem. Copy exact assumes that each tool model is interchangeable."

In this case, copy exact goes even further. It assumes that every atom in every wafer is in exactly the same position and energy state. In addition, every ion during implant would scatter in exactly the same manner.

Such is Intel's manufacturing prowess.


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