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To: etchmeister who wrote (3660)11/23/2007 12:55:04 PM
From: etchmeister  Respond to of 3813
 
In case anybody is left on this board - the push to copper among memory (DRAM and also NAND) seems to be upon us.
SMTL, RTEC and NVLS are all on the same wavelength with regards to this matter - SMTL makes some claims about copper plating which I can not verify but as far as I understand AMD is the only one using SMTL. AMAT has some but the bulk should be NVLS.
To me it also looks NVLS PECVD which is supposed to provide ultrahigh throughput (productivity) is targeting the memory market respectively the transition of the memory market to copper.

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