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To: Rink who wrote (3791)4/11/2008 9:23:18 AM
From: Joe NYC  Read Replies (1) | Respond to of 4590
 
Rink,

Your links seem to confirm my view (and error in the article Keith linked) that immersion litho will start at 45nm. I wonder if immersion is the reason of postponement of 45nm into 2009.

BTW, is anybody in production with immersion lithography? I know that Intel postponed it and is not using it for 45nm. How about IBM? IIRC, AMD is planning to use immersion for their 45nm (in H2 2008?).

I would guess that Numonyx is not planning to use immersion in their upcoming 45nm process. I am also wondering how Nuonyx is planning on staying on leading edge with 200mm fab, since most of the leading edge action is concentrated on 300mm tools.

Joe