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To: misen who wrote (253014)6/7/2008 10:54:21 PM
From: graphicsguruRead Replies (1) | Respond to of 275872
 
Misen,

Forgive the ignorance (I know very little about lithography), but
how do you etch multiple layers at once? I naively assumed that
each layer had to be separately etched before the next layer was
applied. And how do you put different patterns on different layers
if they're etched in a single patterning?



To: misen who wrote (253014)6/8/2008 12:27:49 AM
From: pgerassiRespond to of 275872
 
Misen:

No because there are more than one way to make VCSELs. And integrating them on logic chips like CPUs and GPUs isn't going to use one etch. But you knew that didn't you? No? Well then you need to rethink you ridiculous claim that 200+ scans is impossible. What do you think that MEMP is going to require for 22nm on 193i scanners assuming EUV is late? 4 quadruple length exposure scans per single photoresist layer.

Thus your claim that 200+ scans will never be needed is ridiculous.

Pete