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Politics : Formerly About Applied Materials -- Ignore unavailable to you. Want to Upgrade?


To: Stefan who wrote (9175)10/22/1997 11:29:00 AM
From: davesd  Respond to of 70976
 
Stefan, the yeilds at .25u with 200mm today are lousy, things just get worse at .25u, 300mm. Remember, it's not just making the process chambers bigger, but being able to get the plasma to work on 300mm. The plasma source is a major issue going to 300mm.

dave