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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?

To: craig crawford who wrote (5813)	10/23/1997 6:01:00 AM
From: TideGlider	Read Replies (1) \| Respond to of 25960

Craig: There are reams of research papers for alternative technologies. None are commercial and very few will ever see production. DUV has many years to go. This is not new. Why do you think DUV may not cut the mustard? Why did you post it? Regards Bruce

To: craig crawford who wrote (5813)	10/23/1997 1:20:00 PM
From: Tim Bagwell	Respond to of 25960

Craig, I'll work on a reply for you later today. Basically this is a good idea for FBG's which I had wanted to patent myself so in a way I'm sorry to see someone else write about it. Tim

To: craig crawford who wrote (5813)	10/23/1997 8:59:00 PM
From: Tim Bagwell	Respond to of 25960

Craig, I don't know of any good reason why DUV lithography could not be used for these devices. Of course, most work in this area is done using E-beam because it is a well established technique. As far as university research goes, they are not concerned with high throughput so there is no driving need to use a DUV laser like you see in semi litho. The E-beam is usually preferred in these applications because of its versatility. If these devices or their equivalent fiber counterparts ever find their way into manufacturing then Cymer lasers could certainly be used with phase masks to form the gratings and quarter wave gratings. However, this type of lithography would be more difficult because of the phase mask. Lasers today in semi litho are used to do flood exposure through a mask which is easy by comparison. Hope that helps. Tim