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To: Steven Angelil who wrote (5878)	10/23/1997 1:21:00 PM
From: BillyG	Read Replies (1) \| Respond to of 25960

I agree. IBM is using SVG stepper................. techweb.cmp.com A service of Semiconductor Business News, CMP Media Inc. Story posted at 11 a.m. EDT/8 a.m. PDT, 10/23/97 IBM's embedded DRAM will play key role in its big foundry business By Jack Robertson SAN DIEGO --IBM Corp.'s Microelectronics Division is positioning itself to become a major foundry for new system-level ICs with embedded DRAM, according to presentations at the Dataquest Semiconductor Industry conference was told here. Dataquest analyst Clark Fuhs, who tracks semiconductor equipment, suggested that IBM could beat other global foundry rivals by several years with the capability of making logic and memory circuits on the same chip. "It isn't generally realized that IBM is now the second largest foundry in the world," Fuhs said. "They can strengthen this position by being one of the first foundry producers able to build system-on-a-chip devices." Meanwhile, in a separate panel discussion on Wednesday, Michael Polcari, silicon technology research director at the IBM Thomas Watson Research Center in Yorktown Heights, N.Y., said "system LSI chips" have a great potential for computer applications, especially in graphics. Polcari told Semiconductor Business News in an interview that IBM has already developed prototype system LSI chips, expected to be introduced in several months as commercial products. In addition, he said, IBM would use the same production technology in its Microelectronics Division as a foundry operation for fabless embedded DRAM suppliers. IBM's expertise in trench capacitors in DRAMs has given the firm a big advantage in putting memory on the same chip as logic, according to Polcari. "Trench provides a very planar surface, making it easier to add logic circuitry on the same chip than stacked capacitor DRAMs," the technology used by most other device makers. Polcari said IBM is using the Silicon Valley Group Lithography Micrascan step-and-scan tool with its larger field size to make the system LSI chips. IBM also gains a benefit in processing DRAMs and logic on the chip with the SVGL tool, because the same lithography system is now used in separate memory and microprocessor production lines, he added.