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To: Gerald L. Kerr who wrote (6622)10/26/1997 12:00:00 PM
From: BillyG  Respond to of 25960
 
Thanks for the clarification Gerry. Another factor to consider is that there are generally (statistically) a fixed number of defects per wafer. Therefore, with more chips/wafer you have a lower percentage of defective chips per wafer. This is counterbalanced to some extent because sensitivity to defects may be increased by moving to a smaller line width.

BillyG


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