Axcelis Technologies, Inc.                  Consolidated Statements of Operations                  In thousands, except per share amounts                               (Unaudited)
                              Three Months ended   Twelve Months ended                                December 31,           December 31,                            --------------------  --------------------                               2008       2007       2008       2007                            ---------  ---------  ---------  ---------
   Revenue                      41,977     89,649    250,214    404,800
   Cost of revenue              52,827     57,896    187,599    251,939
   Gross profit                (10,850)    31,753     62,615    152,861
   Operating expenses    Research and development   13,582     17,930     63,262     72,044    Sales and marketing         7,813     11,479     44,573     49,974    General and     administrative            11,802     10,680     43,056     41,718    Impairment of goodwill     42,115         --     42,115      4,658    Impairment of intangibles     and long lived assets     46,949         --     46,949         --    Amortization of     intangible assets            656        656      2,624      2,624    Restructuring charges       3,361      2,506      6,873      2,506                            ---------  ---------  ---------  ---------                              126,278     43,251    249,452    173,524                            ---------  ---------  ---------  ---------
   Loss from operations       (137,128)   (11,498)  (186,837)   (20,663)
   Other income (expense)    Equity income (loss)     of SEN                    (2,567)     2,077     (3,667)    10,416    Interest income               214      1,195      1,614      5,019    Interest expense           (1,739)    (1,605)    (6,744)    (6,427)    Other-net                    (483)      (659)      (169)      (153)                            ---------  ---------  ---------  ---------                               (4,575)     1,008     (8,966)     8,855                            ---------  ---------  ---------  ---------
   Loss before income taxes   (141,703)   (10,490)  (195,803)   (11,808)
   Income taxes (credits)         (258)       127        861       (410)                            ---------  ---------  ---------  ---------
   Net loss                  $(141,445) $ (10,617) $(196,664) $ (11,398)                            =========  =========  =========  =========
   Net loss per share    Basic                   $   (1.37) $   (0.10) $   (1.91) $   (0.11)    Diluted                 $   (1.37) $   (0.10) $   (1.91) $   (0.11)
   Shares used in   computing net loss   per share    Basic                   $ 103,052  $ 102,247  $ 102,739  $ 101,891    Diluted                 $ 103,052  $ 102,247  $ 102,739  $ 101,891
                        Axcelis Technologies, Inc.                       Consolidated Balance Sheets                              In thousands                              (Unaudited)
                                                    Dec. 31,   Dec. 31,                                                     2008       2007                                                  ---------  ---------
   Assets
   Current assets    Cash and cash equivalents                     $  37,694  $  83,877    Marketable securities                                --         --    Restricted cash                                   8,654     17,018    Accounts receivable, net                         27,486     76,067    Inventories, net                                150,113    169,278    Prepaid expenses and other current assets        17,231     32,442                                                  ---------  ---------  Total current assets                              241,178    378,682
   Property, plant and equipment, net                 44,432     68,101  Investment in SEN                                 156,677    132,911  Goodwill                                               --     42,115  Intangible assets                                      --     10,925  Deferred income taxes                                  --         --  Restricted cash, long-term portion                     --         --  Other assets                                       12,894     37,195                                                  ---------  ---------                                                  $ 455,181  $ 669,929                                                  =========  =========
   Liabilities and stockholders' equity
   Current liabilities    Accounts payable                              $   8,066  $  27,054    Accrued compensation                             15,841     17,003    Warranty                                          3,137      5,011    Income taxes                                        337        531    Deferred revenue                                 12,508     35,827    Other current liabilities                         6,897      8,577    Current portion of convertible     subordinated debt                               83,210         --                                                  ---------  ---------  Total current liabilities                         129,996     94,003
   Convertible subordinated debt                          --     79,923  Long-term deferred revenue                          1,872      4,704  Other long-term liabilities                         3,936      5,293                                                                    --  Stockholders' equity    Preferred Stock                                      --         --    Common stock                                        103        103    Additional paid-in capital                      483,546    478,726    Treasury stock                                   (1,218)    (1,218)    Accumulated deficit                            (198,479)    (1,815)    Accumulated other comprehensive income           35,425     10,210                                                  ---------  ---------                                                    319,377    486,006                                                  ---------  ---------                                                  $ 455,181  $ 669,929                                                  =========  =========
  Contact:           Axcelis Technologies, Inc.           Maureen Hart             +1 (978) 787 4266             Fax: +1 (978) 787 4275             maureen.hart@axcelis.com           Investor Contact:           Stephen Bassett             +1 (978) 787 4000             Fax: +1 (978) 787 9133             investor.relations@axcelis.com
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