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To: Scott Brooks who wrote (673)10/29/1997 7:57:00 PM
From: Alan Gallaspy  Read Replies (1) | Respond to of 1305
 
Scott, re: "fab processes book"

I think you may be interested in

Microchip Fabrication: A Practical Guide to Semiconductor Processing
by Peter Van Zant (3rd edition, 1996?)
ISBN: 0070672504

and also a bit older but still pretty relevant

"Silicon Processing for the VLSI Era" S. Wolf and R.N Tauber
published by Lattice Press, may be out of print but is widely available from university libraries.



To: Scott Brooks who wrote (673)10/29/1997 11:03:00 PM
From: Artslaw  Respond to of 1305
 
This may be the message you are referring to, which mentions the above titles.

exchange2000.com

Steve