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To: Mason Barge who wrote (7458)10/31/1997 9:52:00 AM
From: FJB  Respond to of 25960
 
Phase Shift Masks are the primary way to extend these tools.

The lithography firm has "spec'd" its excimer laser Micrascan-III for 0.2-micron capability, but like other laser 248-nm tools, it is expected to handle 0.18-micron wafers as well. The system gets a more defined pattern than the Microascan II-plus from the coherent light source.
techweb.com