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To: rsc who wrote (8127)	11/4/1997 5:49:00 PM
From: BillyG	Read Replies (1) \| Respond to of 25960

I'm not sure if this Lambda news was posted last week.............. sumnet.com From the October 27, 1997 Issue of Electronic News The Fab Line By Chad Fasca and Dylan McGrath Lambda Physik reported it is ready to ship a new 248-nanometer excimer laser, the NovaLine Litho/S design, to provide optimum performance for the next generation of deep-ultraviolet microlithography steppers and scanners using high-numerical-aperture projection lenses. The company claims the laser has the highest spectral purity of any DUV excimer laser presently available. According to the company, a key element in achieving this performance is the use of a patented polarization coupled resonator (PCR) design. PCR improves both spectral purity and laser operating efficiency; increased efficiency is said to extend optical component lifetimes and lengthen maintenance intervals. PCR is the result of a joint development effort between the Tokyo-based Matsushita Research Institute of Technology and Lambda Physik. According to Lambda Physik, the laser will be displayed at Semicon/Japan later this year, Dec. 3-5.