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To: zamboz who wrote (1701)11/10/1997 5:52:00 PM
From: Rob-Chemist  Read Replies (1) | Respond to of 3696
 
Thanks for posting that article. From their descriptions of the manufacturing process, it sounds like UTEKs machines are sufficient for the next several years (10G per sq. in. requires ca. 0.68uM resolution). It appears that the more interesting problem is the deposition process. The layer of copper needs to be ca. 3 nM (I'm assuming an atomic radii of 0.2 nm for copper - too lazy to look up the actual value.).