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To: David M.Sokol who wrote (9360)11/13/1997 8:50:00 AM
From: rsc  Read Replies (1) | Respond to of 25960
 
DUV stepper test method wins Japanese patent

techweb.cmp.com


How does this impact on Cymer or its customers?

One choice quote:
Next year "promises to see a dramatic increase in the production line use of DUV 248-nm laser steppers for chip production," said Gary Forrest, inventor of the method and president of SensorPhysics.