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To: TheSpecialist who wrote (690)	11/19/1997 4:24:00 AM
From: FJB	Read Replies (1) \| Respond to of 1305

News blurb. NEC has developed high-precision aluminum circuit production technologies for manufacturing LSIs with 0.18 micron and eventually even 0.13 micron lines. These are technologies which promise for etching high aspect ratio aluminum lines in layered barrier metal structures. A resist layer for excimer lasers is used in small wiring layouts, and the thickness of the layer must be less than the selected aspect ratio. By diffracting the change in the amount of resist etching, NEC has found that the etching speed in barrier metal and cup metal of titanium nitride is an important factor in aiding reduction of the thickness of resist mask. The thinner the line being laid, the more critical the selected ratio in the resist. Trifluoromethane and other additives can be mixed with the chlorine etching gas to aid the selectivity and improve the durability of the etching.

To: TheSpecialist who wrote (690)	12/2/1997 11:35:00 PM
From: Andrew Vance	Read Replies (2) \| Respond to of 1305

Sorry for the belated comment, but the above mentioned post was worthy of a compliment. I have been busy for the past few weeks and fell behind on this thread. Good commentary on your part. BTW-I just completed catching up on this thread and would very much like to thank the growing list of new posters who have taken this thread to a new level. I started this thread to attract those people with a great deal of knowledge or with the desire to learn more about certain topics. As of the last 50 or so posts, I am moving to the side where I am learning from a great deal of qualified experts who have surpassed my expertise. This makes this thread a complete success as far a I am concerned. The transition from teacher to student has occurred for me and I assume it has for others on this thread. The thread is complete and has accomplished one of my personal goals. All of us should grateful to those that have chosen to join us and expand our horizons. All this was accomplished within 1 year. Congratulations to all. Andrew