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To: Yakov Lurye who wrote (9568)	11/13/1997 11:09:00 PM
From: Apple12	Respond to of 25960

More reasons to keep buying!!! techweb.cmp.com Ten-year-old SensorPhysics said its low-contract polymer provides much greater dynamic range, compared to photoresist, allowing defects in illumination to be detected sooner. Next year "promises to see a dramatic increase in the production line use of DUV 248-nm laser steppers for chip production," said Gary Forrest, inventor of the method and president of SensorPhysics. "The SensorPhysics testing method will allow statistical process control methods to be employed to monitor the precise distribution of UV light, allowing illumination problems to be quickly separated from process problems". The company said a similar SensorPhysics technology is widely employed in Japan for testing laser annealing of a-Si for LCD production.