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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?


To: Volsi Mimir who wrote (9786)11/15/1997 8:18:00 AM
From: TideGlider  Respond to of 25960
 
This link has information on various (old) experiments , yet it
has much information on steppers, masks, lasers that the less
technically trained (me :) might find interesting. It notes where
(years ago) they modified an ULTRATECH Stepper with a Cymer Eximer
laser, replacing the Mercury Vapor system. (UC Berkeley)

Just in case anyone is interested. They also have operating instructions and the like.

Bruce

www-microlab.eecs.berkeley.edu:8080/text/equipment.manual.html