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To: Lee Penick who wrote (40454)	11/15/1997 9:13:00 PM
From: Yousef	Read Replies (1) \| Respond to of 186894

Lee, Re: "Does AMAT make the steppers, or some other company?" The current DUV tool manufacturers are SVGL, ASML, Nikon and Canon ... these tools are capable of defining features that are smaller than the wavelength of exposure (248nm). this is accomplished with very high Numerical Aperature (NA) lenses and advanced photoresists. Re: "What type of mechanical device (or otherwise) can move a wafer in 0.02 micron increments to line it up properly?" The stage that holds the wafer is moved by stepper motors and the stage's position is measured using a laser interferometer (X & Y) to very accurately determine the stage position relative to the lens column. Each chip is individually exposed so accurate stepping is critical ... Paul did an excellent job explaining how the mask/reticle is aligned to the wafer. Yousef