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To: FJB who wrote (10462)	11/24/1997 6:27:00 PM
From: BillyG	Read Replies (1) \| Respond to of 25960

More on Lucent's SCALPEL e-beam system................ DuPont Photomasks and Lucent Technologies to Explore Photomask Production for S MURRAY HILL, N.J.--(BUSINESS WIRE)--Nov. 24, 1997--Lucent Technologies and DuPont Photomasks, Inc. (DPI) have agreed to explore manufacturing issues involving masks for use in the Bell Labs SCALPEL(TM) electron beam lithography program. Utilizing existing, state-of-the-art manufacturing technology DPI has in place to support advanced optical methods of semiconductor production, coupled with their previous experience in membrane mask developments, DPI and Lucent Technologies will address the manufacture of silicon nitride membrane masks for use in the SCALPEL system. By employing available photomask manufacturing technology, Lucent expects to accelerate the commercialization of the SCALPEL system for use in semiconductor manufacturing. The SCALPEL (Scattering with Angular Limitation in Projection Electron-beam Lithography) electron beam lithography system uses high-energy electrons, projected through a photomask, to create integrated circuit features just 0.08 microns wide - overcoming many of the limits placed on the semiconductor industry by current optical lithography production systems. Sponsored in part by SEMATECH, the effort is one of several collaborative initiatives by the Austin-based semiconductor manufacturing research consortium to generate knowledge that will lead to an industry consensus on the next generation of lithography technology. "We are very pleased that DPI has agreed to work with us to demonstrate the viability of the SCALPEL e-beam lithography system as a production tool for the semiconductor industry," said Lloyd Harriott, head of the Advanced Lithography Research Department at Bell Labs. Ken Rygler, executive vice president of strategic planning at DPI, observed, "Lucent's selection of DPI is another example of leading semiconductor manufacturers' confidence in our technological development capabilities. As the world's largest photomask manufacturer, DPI is committed to developing masks which will help enable future generations of semiconductor manufacturing technology." Current chip manufacturing systems produce features as small as 0.35 and 0.25 microns; next-generation optical lithography systems promise to produce features at 0.18 and 0.13 microns. Unlike optical lithography systems, the SCALPEL system uses electron beams to expose patterns on a wafer's surface. Since an electron's wavelength is much smaller than that of ultraviolet light, it is possible to print smaller features using e-beams than using today's manufacturing technologies. At 0.08 microns, the SCALPEL systems leapfrogs several generations of design rules and promises continued development of ever-smaller, more powerful chips well into the 21st Century. The SCALPEL electron beam lithography system, developed at Bell Labs, produced its first sub-tenth-micron features in June 1996. Late last month, the SCALPEL system produced a one-centimeter-square field of features. In December, 1996, Integrated Solutions, Inc., agreed to develop, market, manufacture and support systems based on SCALPEL technology licensed from Lucent Technologies. This spring, MCNC agreed to provide mask blanks for SCALPEL systems. Commercial resists are used to etch the wafers produced with the SCALPEL system. DuPont Photomasks, Inc. (NASDAQ:DPMI), is the world's leading supplier of photomasks, operating globally from nine strategically located facilities in North America, Europe, and Asia. The company produces and supplies photomasks as well as photoblanks (photomask substrates) and pellicles (protective covers for photomasks). DPI is headquartered in Round Rock, Texas, and had worldwide sales in fiscal 1997 of over $260 million. DPI maintains a Web site at photomask.com. Lucent Technologies (NYSE:LU) designs, builds and delivers a wide range of public and private networks, communications systems and software, data networking systems, business telephone systems, and microelectronic components. Bell Laboratories is the research and development arm for the company. For more information on Lucent Technologies, visit its web site at lucent.com. --30--kvc/ny CONTACT: Carl Blesch, Lucent Technologies 908-582-7474 (office) 908-306-0784 (home) cblesch@lucent.com or Dianne Schedler, DuPont Photomasks, Inc. 512-310-6559 (office)