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To: john douglas who wrote (10683)11/28/1997 11:27:00 AM
From: FJB  Read Replies (1) | Respond to of 25960
 
I found the story someplace else. This is Nikon's new step and scan system.

11/27/97
Nikon Corp. has developed a new excimer-laser stepper for production of semiconductors, which increases processing capacity by 40% over comparable existing models, company officials said Wednesday.

The new model, NSR-S202A, is capable of printing circuit patterns with a line width of 0.25 microns or less.

It can process over 80 200-millimeter wafers per hour, compared to about 60 with existing machines.

Nikon aims to win orders for 100 of the new machines in the first year of sales starting in December.