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To: Michael C Quesnel who wrote (3626)	12/1/1997 9:42:00 PM
From: Peter Moyer	Respond to of 10921

Sorry to change the subject, but does someone know the history behind the mercury lamp based litho tools used today (mainly by SVGI)? When did this technology hit the market? How long was it used in "developmental production" before moving to mass production? What technology preceded it? How long will it last before a move to DUV lasers is required? I notice that Intel is still using this technology (from SVGI) for its .25 processes. When will they absolutely have to make the change to DUV lasers? Sorry for all the questions, but thought I'd ask them all if I were to ask any of them.... :] Thanks, Pete (Where I'm going with this is: when will Intel need to buy all tools with a DUV laser? Hopefully from Cymer!)