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To: FJB who wrote (11134)	12/7/1997 1:34:00 PM
From: Stanley L Brown	Respond to of 25960

Rob, Bear in mind all of zeev's post lean toward the short side! Happy Trading Stan

To: FJB who wrote (11134)	12/7/1997 4:10:00 PM
From: James Word	Respond to of 25960

Robert RE:"Ideally, semiconductor makers want to hold down their capital costs by using the expensive UV step-and-scan systems to process only the critical layers and use existing i-line steppers for the larger number of non-critical layers. But unless the i-line tools have a comparable field size as the scanner, there is a "mix and mismatch" for making non-critical layers. " At least one stepper manufacuturer has an i-line scanner system available. Others may follow. It may be that eventually scanner systems will begin to displace stepper systems altogether. That scenerio could begin with the 300mm transition. One way to keep 300mm throughput at a reasonably high level is to use 9 inch reticles with 30mmX50mm field sizes. That's nearly 4X the area of the current 22mmX22mm size. James Word