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To: Yakov Lurye who wrote (11291)12/9/1997 8:37:00 PM
From: Mr. Aloha  Respond to of 25960
 
Thanks for the links. Interesting!

Sounds like business is ready to roll.

Aloha



To: Yakov Lurye who wrote (11291)12/10/1997 12:16:00 PM
From: Tulvio Durand  Read Replies (2) | Respond to of 25960
 
Yakov, the Nikon link mentions joint use of i-line and DUV steppers in "mix and match". Does the "mix and match" mean that the new generation ICs are printed with combination of 0.25 nm and 0.35 nm features in different layers of the IC? If not, can someone explain "mix and match"? Thanks. Here's excerpt from the referenced Nikon link: <<NSR-2205EX14C, which employs KrF excimer laser (wavelength 248 nm) for the 22 x 22 mm exposure field, has achieved sub-quarter micron resolution. NSR-2205EX14C has also improved the throughput by 35% compared to its predecessor NSR-2205EX12B. NSR-2205i14E using i(I)-line (wavelength 365 nm) for its light source is concurrently offered to take an utmost advantage of the two types of machines by "mix-and-matching".>>