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To: Yakov Lurye who wrote (11478)12/12/1997 4:03:00 PM
From: Steven Angelil  Respond to of 25960
 
So, what's the final damages today? Anyone have a closing quote and volume? Thanks,

Steve



To: Yakov Lurye who wrote (11478)12/12/1997 4:14:00 PM
From: Tulvio Durand  Respond to of 25960
 
Remember that DUV stepper can do both 0.25 and 0.35 nm features at 80 wafers/hr. So it is more versatile than new i-line tools as well as faster than old i-line tools -- suggesting DUV is a better investment than i-line over the long term. But arguing against DUV is 30% or so greater capital cost and 100% (?) higher maintenance cost and large startup/learning cost. The tradeoff will tilt toward DUV when DUV produced ICs become more profitable than i-line produced ICs. Based on VLSI's projection i-line will be around for quite a while (less than 50% DUV steppers sales Y2000). Tulvio