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To: James Word who wrote (12163)	12/31/1997 12:28:00 PM
From: FJB	Read Replies (1) \| Respond to of 25960

James, Does Intel do all its CD photolithography with SVGL tools or do they also use Nikon for CDs? What does Gordon Moore mean when he says, "Intel's 0.25micron process has moved to deep ultraviolet."? Today's 0.35micron process uses visible light in its production lithographic process. Intel's 0.25micron process has moved to deep ultraviolet. Research into the 0.18micron process is pushing deeper into the ultraviolet spectrum: the benefits of 193nm light is that the same optical tools and process methods can be used. Good experimental results have been obtained in the lab but tools do not currently exist for large area coverage or for a production environment. developer.intel.com BTW, I have no problem with Intel using SVGL tools for CDs, because as you know I own a bunch of SVGI. :-) I'm just trying to get a handle on their process roadmap. TIA, Bob Intel's Micrascan order. svg.com More old info. SVGL has now developed a Micra-scan-III step-and-scan system with a deep-UV excimer laser and has shipped the first one to IBM Microelectronics . The second model is expected to ship shortly to Intel. Shipment was reportedly delayed while SVGL matched its lens to the narrow-beam light source. But Intel can always use its present installed Micrascan-II systems to make quarter-micron wafers until the excimer-laser version is ready to go, Gargini said. Aubrey (Bill) Tobey, veteran lithography consultant and president of ACT International, Burlington, Mass., concurred that the Micrascan-II mercury lamp could indeed be used to reach 0.25-micron and perhaps even down to 0.18-micron linewidths. But the wide-beam illumination may make it difficult to get the very sharp line edges that the narrow beam of deep-UV excimer lasers provides, he noted. Intel has been SVGL's best customer, installing dozens of the Micrascan-II systems to make the critical five or six layers for its Pentium and Pentium Pro microprocessors. IBM has also continued to buy SVGL systems over the years. Despite a large increase in output last year, SVGL's production line has struggled to keep up with the large orders placed by the two Big semiconductor manufacturers. techweb.cmp.com