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Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?

To: Brumar89 who wrote (1003072)	3/1/2017 12:37:05 PM
From: Wharf Rat	Read Replies (3) \| Respond to of 1572621

Perhaps we should strengthen the EPA, instead of getting rid of it.

To: Brumar89 who wrote (1003072)	3/1/2017 12:50:04 PM
From: Land Shark	Read Replies (2) \| Respond to of 1572621

And? What's your point? They didn't quantify the NF3 fugitive emissions. So it's BS as usual.

To: Brumar89 who wrote (1003072)	3/1/2017 5:53:51 PM
From: PKRBKR	Read Replies (2) \| Respond to of 1572621

NF3 gained popularity as a substitute for even more harmful global warming gases that were used in the same types of manufacturing I actually know a lot about this as I worked on a Sematech committee battling the Clinton/Gore EPA to reduce per-fluorinated hydrocarbons (CF4, C2F6, CHF3, etc.) as they had "High" global warming potentials. These gases are used as silicon, silicon dioxide, Ti and W etch gases and were/are critically important to making semiconductors. Ironically NF3 was offered up as a replacement source of fluorine even with a much higher global warming potential. The NF3 could be cracked in a microwave plasma downstream from the process tool and the F could be water scrubbed away. The other gases were less amenable to plasma destruction so the industry offered this expensive approach and the EPA backed down a bit. Regardless the minuscule emissions of all of these gases don't add up to squat in the atmosphere. No wonder there is no more silicon being made in Silicon Valley.