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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?

To: Robert DeHaven who wrote (12456)	1/9/1998 3:44:00 PM
From: BillyG	Respond to of 25960

I think that it's good for the future of optical lithography in general, and for CYMI in particular. CYMI makes ArF eximer lasers. TSI is applicable to krypton-fluoride and other potential optical lithography such as 13-nm wavelength extreme UV as well. Using the ArF laser with conventional single-layer resists, ASET researchers cut patterns as fine as 0.13 micron. ASET had already used TSI to fabricate 0.09-micron line-and-space patterns last March. Now the researchers proved ArF could cut isolated patterns--considered to be difficult with laser lithography--as fine as a 0.04-micron isolated line and a 0.09-micron contact hole. That's roughly the equivalent of a process for a microprocessor with 160 million transistors/cm2, according to the Semiconductor Industry Association (SIA) technical road map. The density is more than 20 times that of a microprocessor on a 0.25-micron process. The 0.09-micron line-and-space patterns correspond to a 16-Gbit DRAM process. "It may be possible for ArF lithography to go as deep as a 0.07-micron L/S pattern," said Sasago. "I believe that ArF can be used for at least three generations, in terms of DRAM: the second generation of 1-Gbit, 4-Gbit and 16-Gbit devices."