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To: Shakush who wrote (12608)1/14/1998 9:53:00 PM
From: FJB  Read Replies (1) | Respond to of 25960
 
Shakush,

Yes, the Micrascan II+ is the only i-line stepper I'm aware of that is being used for 0.25 geometries. SVGI's problem has been their inability to produce a large number of systems, so they were limited to selling to a few customers, but mostly Intel and IBM. They are in the process of a production ramp(have been, ever since I've owned the stock unfortunately), but the ratio of Micrascan IIIs(Cymer based) is increasing. My expectation is that by the time they get production up(they claim 200 units/year by late '98 or early '99) that the majority of systems will be Micrascan IIIs. At least, that is what Intel will be ordering with Merced on the horizon.

Again, almost everyone else uses excimer lasers for 0.25 geometries and below.

Bob