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To: Robert DeHaven who wrote (12616)1/14/1998 10:44:00 PM
From: FJB  Respond to of 25960
 
Bob,

RE: the Lucent fab

They say production capacity will be greater than 25,000 wafers/month. This would be impossible if they were using e-beam(throughput is several wafers/hour), so it is safe to assume that they will be using optical lithography and you know who's light source.

Bob