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To: Paul Engel who wrote (3829)1/15/1998 1:30:00 AM
From: Yousef  Read Replies (2) | Respond to of 6843
 
Paul,

Re: "...there was less wet etching steps in the CS44E (0.25 process) therefore it should have higher yields than their current process."

What a bunch of horse manure ... there are many wet process steps in
a .25um process just like a .35um process. In fact, with point of use
filtration on benches and acid processors, these should be very clean steps.

Here are some/most of the wet steps in a .25um process:

All lithography resist develops (~19 times)
Pre-furnace cleans (~6 times)
HF oxide dips (5 times)
Wet resist strips (~19 times)
Wet Ti etch (1 time)
Un-masked nitride etch (1 time)

To me, there's still a lot of wet processing ... and these should be close
to "no brainers". Oh I forgot, we are talking about AMD!!

Make It So,
Yousef