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To: FJB who wrote (12632)	1/15/1998 2:25:00 PM
From: James Word	Respond to of 25960

Rober RE: Extending i-line vs. DUV for 0.25um Extending i-line with enhancements like PSM or OAI only works for highly repetive, dense structures. The isolated, random structures in processors and logic devices require DUV for 0.25um. Memory makers can take advantage of extending i-line. Extending i-line is a good thing to do if you can do it (see above). You dont have to change resist technology. I-line resist are based on DNQ/Novolak and have been around for decades. DUV requires chemically amplified resists, which are quite sensitve to many variables. They are also 2 to 3 X more expensive than i-line. Also, with DUV you have the excimer laser that most companies don't have experience with. In short, i-lines advantages are in cost and experience. James Word