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To: Tulvio Durand who wrote (12664)1/15/1998 4:46:00 PM
From: FJB  Respond to of 25960
 
Tulvio,

This sounds correct, but James is more qualified to address this.

Bob



To: Tulvio Durand who wrote (12664)1/15/1998 8:45:00 PM
From: James Word  Read Replies (1) | Respond to of 25960
 
Tulvio RE: "I-line is 0.25um-capable because its light spectrum contains a small amount of DUV, but significantly less than the DUV output from Cymer's KrF laser. "

Correct. The Mercury emission spectra doesn't contain any strong
peaks in the deep UV range. Therefore the intensity is probably
quite low, and that does impact throughput.

James Word



To: Tulvio Durand who wrote (12664)1/16/1998 1:02:00 PM
From: Mr. Aloha  Respond to of 25960
 
That was my impression.

I-line is like using a 250W microwave when you can upgrade to a 1000W system. I'd like to know the exact costs/output etc..

They can try and squeeze as much juice from the bulb as possible but their days are numbered. With DUV moving lower and lower(smaller), it gives them a much larger reach. In 2 years...everything will probably be .25 or lower. I-line will be used for less technical areas.

Aloha