To: Lee Fredrickson who wrote (4824 ) 1/18/1998 10:38:00 PM From: Starlight Read Replies (1) | Respond to of 9695
Here's another article from the same SAL newsletter: SAL: THE INNOVATOR SAL's history of innovation goes back to 1984 when x-ray lithography research was started and the first x-ray exposure tool was delivered. That stepper was a step-and-scan system, the first of its kind. The first commercial x-ray stepper, which included automated wafer and mask handling, was delivered in 1989 to IBM by Karl Suss. In 1994, SAL was founded as a spin-off of Karl Suss. Most of the x-ray lithography technology and infrastructure in place today is a direct result of SAL's influence and the support of its allies (see p. 2 for details). Much of the infrastructure for x-ray lithography insertion is in place, but commercialization requires a commercial mask house, a mask writer, and a point source for granularity (currently, a complete synchrotron ring must be purchased to use one stepper for development or production). Better mask writers are needed for advanced design-rules regardless of lithography technology, and several companies have aggressive programs underway SAL, the innovator, is addressing two of these infrastructure issues - - a commercial mask house, and the need for granularity with a synchrotron source. X-Ray Mask Company SAL is spearheading the formation of a commercial x-ray mask facility. Current x-ray mask-making capability resides in research labs such as the Center for X-ray Lithography (CXRL) at University of Wisconsin, in-house development groups, and semi-commercial manufacturing facilities such as IBM's Advanced Mask Facility and NTT-AT. SAL is bringing together mask technology from IBM, mask users, financing sources, and a commercial mask house with the goal of offering production x-ray masks. This will be a major step in providing the necessary infrastructure for production. -------------------------------------- Note the reference to "point source" in the article. I don't know what "granularity" means. Anyone? Any Cymer people who might have wandered over here know? Betty