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To: FJB who wrote (13056)	1/23/1998 8:40:00 PM
From: James Word	Read Replies (2) \| Respond to of 25960

Yakov and Robert RE: % of DUV vs. I-LINE Although the majority of layers on a 0.25um process are not super-critical and don't require DUV, I'm not surprised to see a high percentage of DUV orders in 1998. That's because many companies, expecially those strapped for cash, will want to use their old i-line tools in conjunction with newly purchased DUV tools. That is what our company will do, and I know that many others will as well. Those Japanese DRAM manufacturers who are slowing 16M and ramping 64M won't just shit-can their i-line tools. Many will want to augment them with DUV in 1998 and move to 0.25um and 64M. James

To: FJB who wrote (13056)	1/24/1998 7:01:00 AM
From: Yakov Lurye	Read Replies (1) \| Respond to of 25960

Bob, thanks for pulling out VLSI/DATAQUEST information. ASML's 60% DUV forecast for 98 is higher than VLSI's 50% DUV and Dataquest's 46% DUV predictions for the industry as a whole. Two interpretations possible: 1) ASML's order mix differs significantly from Canon's or Nikon's - I doubt it, although Nikon reportedly had some problems. 2) VLSI and Dataquest forecasts were prepared before the currency crisis in Asia and new fab pushouts. ASML forecast reflects lower overall demand, with DUV orders relatively unaffected. >>64Mb DRAM require DUV for TWICE as many layers as complex MPUs.>> Not sure how to use this info when calculating i-line/DUV ratios, but it helps me to appreciate your earlier point about 64Mb crossover triggering massive DUV purchases. Regards, Y.