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To: Yakov Lurye who wrote (13066)	1/24/1998 8:19:00 AM
From: Robert Scott	Respond to of 25960

As if we didn't know: Nevermind - URL didn't take.

To: Yakov Lurye who wrote (13066)	1/24/1998 2:36:00 PM
From: James Word	Read Replies (1) \| Respond to of 25960

Yakov: RE DUV/i-line throughput "on matching old equipment with new steppers that have higher throughput?" I guess it depends on how old the i-line equipment is. For instance, Canon's generation 2 system has a throughput of 50wph, their generation 5 system has a throughput of 75wph. 75wph is the throughput of their latest DUV, a perfect match for a newer i-line. In general, most i-line steppers used for 0.35um are new enough to have a high throughput that nearly equals the latest DUV. In general, I would think that the througput mismatch between old i-line and new DUV systems would be most tolerable to cash-strapped companies that can't afford to build a completely new fab. The news lately from the Japanese DRAM guys seems to indicate that they are doing just that. On the other hand, a company like Intel can afford to build a new fab for each process generation and switch the older fabs to less technology intensive products like chipsets and microcontrollers. James Word