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To: Tulvio Durand who wrote (13833)1/31/1998 10:30:00 PM
From: TideGlider  Respond to of 25960
 
Tulvio: There is only one relentless cheerleader for XRL. She is very nice but ahead of her time.. <G>

TG



To: Tulvio Durand who wrote (13833)2/1/1998 5:37:00 PM
From: Tulvio Durand  Read Replies (1) | Respond to of 25960
 
Akins said on 9/24/97 that the Cymer developmental F2 laser will print 0.07 micron lines by the year 2009. Thus I see the future of optical litho extending until at least 2015. SAL, a vociferou advocate of XRL agrees that, because of the significant optical litho experience and established support infrastructure -- and significantly greater throughput -- XRL cannot compete as long as optical litho can successfully print the critical dimmensions needed. So I don't see a successor to optical litho 'til about 2015, except in isolated special cases like the IBM XRL pilot production facility that will be making proof of concept ICs. And by that time the successor to optical litho may well be a Cymer XRL, as Cymer is now developing a soft X-ray source for this purpose. Tulvio